Title :
Scanning infrared microscope
Author :
Mzhelskiy, Ivan V. ; Polovinkin, Vladimir G.
Author_Institution :
Inst. of Semicond. Phys., Russian Acad. of Sci., Novosibirsk, Russia
fDate :
June 30 2011-July 4 2011
Abstract :
Scanning infrared microscope (SIRM) based on InAs matrix or InSb line photo detector is described.
Keywords :
III-V semiconductors; indium compounds; optical microscopes; photodetectors; InAs; InAs matrix; InSb; InSb line photodetector; scanning infrared microscope; Detectors; Light emitting diodes; Optical microscopy; Physics; Scanning electron microscopy; Software; Infrared; SIRM; microscope;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2011 International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-61284-793-1
DOI :
10.1109/EDM.2011.6006939
