Title :
Imprinting of thermo-optic polymer-waveguide Mach-Zehnder interferometer with bottom-up electric heating
Author :
Lor, K.P. ; Chiang, K.S. ; Liu, Q. ; Chan, H.P.
Author_Institution :
Dept. of Electron. Eng., City Univ. of Hong Kong, Kowloon, China
Abstract :
We demonstrate a new approach of fabricating a thermo-optic polymer-waveguide Mach-Zehnder interferometer (MZI). The MZI is fabricated with an imprinting technique, where the electrode heater is formed at the bottom of the waveguide substrate.
Keywords :
Mach-Zehnder interferometers; electric heating; optical waveguides; thermo-optical devices; bottom-up electric heating; electrode heater; imprinting technique; thermo-optic polymer-waveguide Mach-Zehnder interferometer; Dielectric substrates; Electrodes; Etching; Lithography; Optical attenuators; Optical polymers; Optical waveguides; Resistance heating; Silicon; Thermooptical devices;
Conference_Titel :
OptoElectronics and Communications Conference, 2009. OECC 2009. 14th
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-4102-0
Electronic_ISBN :
978-1-4244-4103-7
DOI :
10.1109/OECC.2009.5214416
