Micromotor assembly using high accurate optical vision feedback for microrobot relative 3D displacement in submicron range

Author

Sulzmann, A. ; Breguet, J.-M. ; Jacot, J.

Author_Institution

Dept. of Microeng., Swiss Fed. Inst. of Technol., Lausanne, Switzerland

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

279

Abstract

Our project is to develop a high precision tracking system to guide the newly developed microrobot during a microassembly task. Due to the working space of the Cl-robot, it has been necessary to develop new techniques to cope with manipulation of microsystems, visualization, simulation and positioning in general as also described in this article. A micro robot capable of manipulating micro systems and micro structures with a resolution higher than 10 nm and a vision feedback allowing a sub micron absolute, and nanometric relative positioning has been successfully developed and tested. A LIGA-micromotor has been successfully assembled

Keywords

manipulators; micromotors; position control; robot vision; Cl-robot; LIGA-micromotor; calibration; high precision tracking; microassembly; micromotor assembly; microrobot; microsystems; nanometric relative positioning; optical vision feedback; positioning; relative 3D displacement; simulation; submicron absolute positioning; submicron range; vision feedback; visualization; Etching; Feedback loop; Grippers; Micromotors; Microscopy; Optical feedback; Position measurement; Robot vision systems; Robotic assembly; Space technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613638

Filename

613638