Title :
A MEMS variable capacitor with piezoresistive position sensing fabricated in a standard 0.35um CMOS process
Author :
Zahirovic, N. ; Mansour, Raafat R. ; Yu, Min-Chieh
Author_Institution :
Univ. of Waterloo, Waterloo, ON, Canada
Abstract :
A variable MEMS capacitor with piezoresistive feedback is presented. The capacitor is fabricated in a commercial 0.35um CMOS process with MEMS post-processing. The work presented demonstrates a piezoresistive sensing scheme capable of controlling hysteresis effects in a CMOS-MEMS variable capacitor. Potential applications of the sensing scheme include closed-loop control of variable capacitors and detection of dielectric charging.
Keywords :
CMOS integrated circuits; capacitors; micromechanical devices; CMOS-MEMS variable capacitor; MEMS variable capacitor; closed-loop control; dielectric charging deetection; hysteresis effect control; piezoresistive feedback; piezoresistive position sensing; size 0.35 mum; CMOS process; CMOS technology; Capacitors; Feedback circuits; Hysteresis; Micromechanical devices; Piezoresistance; Radiofrequency microelectromechanical systems;
Conference_Titel :
Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4244-6056-4
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2010.5516079
