Implant charging dependence on photo resist bake and electron flood gun

Author

Romig, Terry ; Chao, King ; Rendon, Michael J. ; Azrack, Marijean

Author_Institution

Motorola Inc., Austin, TX, USA

fYear

2000

fDate

2000

Firstpage

558

Lastpage

560

Abstract

Some ASIC parts in the 0.5 μm range experienced severe yield loss due to implant charging issues during the source/drain extension implant. The failing dice were in a circular pattern. The edge intensive poly over gate oxide test structures showed depressed breakdown voltages while other gate oxide integrity structures were not affected. Photo resist out-gassing induced vacuum related holds had strong correlation to reduced yield and depressed breakdown voltages. Replacing the forward biased electron shower with the newer reverse biased electron shower showed improved yield while the optimization of the photo resist UV bake eliminated the vacuum related holds

Keywords

application specific integrated circuits; electric breakdown; electron guns; electron-surface impact; failure analysis; integrated circuit reliability; integrated circuit testing; integrated circuit yield; ion implantation; outgassing; photoresists; semiconductor device breakdown; semiconductor doping; surface charging; 0.5 mum; ASIC parts; breakdown voltages; circular pattern; depressed breakdown voltages; edge intensive poly over gate oxide test structures; electron flood gun; failing dice; forward biased electron shower; gate oxide integrity structures; implant charging; photo resist UV bake; photo resist bake; photoresist out-gassing; reduced yield; reverse biased electron shower; source/drain extension implant; vacuum related holds; yield loss; Application specific integrated circuits; Chaos; Electron beams; Electron tubes; Floods; Implants; Potential well; Resists; Testing; Vacuum breakdown;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology, 2000. Conference on

Conference_Location

Alpbach

Print_ISBN

0-7803-6462-7

Type

conf

DOI

10.1109/.2000.924213

Filename

924213