Beam noise as a tuning aid for low energy ion beams

Author

Graf, Michael A. ; Tieger, Daniel R. ; Vanderbert, B.H.

fYear

2000

fDate

2000

Firstpage

619

Lastpage

622

Abstract

An experimental investigation of the noise content of low energy, high perveance ion beams is presented. Measurements of beam noise are made by monitoring Faraday beam current. Certain amplitude and frequency characteristics of this noise are identified as precursors to unstable beam behavior and can be used to aid in automated tuning for more stable beam solutions. Comparisons of tuning solutions which generate beams with quantitatively different noise characteristics are presented in context of automated tuning repeatability and beam stability. Similarities and differences across various high current implanter platforms are discussed. A theoretical analysis of beam and plasma instabilities is presented and compared with observations

Keywords

beam handling techniques; ion beams; ion implantation; noise; particle beam diagnostics; particle beam stability; plasma instability; Faraday beam current; amplitude characteristics; automated tuning; automated tuning repeatability; beam noise; beam stability; frequency characteristics; high current implanter platforms; low energy high perveance ion beams; low energy ion beams; noise content; plasma instabilities; precursors; stable beam; tuning aid; unstable beam behavior; Character generation; Current measurement; Frequency; Ion beams; Monitoring; Noise generators; Noise level; Noise measurement; Stability; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology, 2000. Conference on

Conference_Location

Alpbach

Print_ISBN

0-7803-6462-7

Type

conf

DOI

10.1109/.2000.924229

Filename

924229