A novel micromachined pump based on thick-film piezoelectric actuation

Author

Koch, Michael ; Harris, Nick ; Evans, Alan G R ; White, Neil M. ; Brunnschweiler, Arthur

Author_Institution

Dept. of Electron. & Comput. Sci., Southampton Univ., UK

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

353

Abstract

A new silicon-based micropump is described in this paper. The key element of the device is a thick-film/silicon micromachined hybrid actuator. The actuation principle relies on the flexure of a screen printed piezoelectric lead zirconate titanate (PZT) layer on a silicon membrane (8 mm×4 mm×70 μm). Inlet and outlet valves are of the cantilever type and use deep boron diffusion together with KOH etching. Pump rates of up to 120 μI min^-1 have been achieved. A maximum backpressure of 2 kPa was measured when using a 600 V_pp sinusoidal drive voltage at 200 Hz across a 100 μm thick PZT layer

Keywords

boron; elemental semiconductors; lead compounds; micromachining; micropumps; piezoceramics; piezoelectric actuators; silicon; 100 micron; 2 kPa; 200 Hz; 600 V; PZT-Si:B; PbZrO3TiO3-Si:B; backpressure; cantilever type; hybrid actuator; inlet valves; micromachined pump; outlet valves; pump rates; screen printed piezoelectric layer; sinusoidal drive voltage; thick-film piezoelectric actuation; Actuators; Biomembranes; Boron; Etching; Micropumps; Silicon; Thickness measurement; Titanium compounds; Valves; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613657

Filename

613657