Title :
Pumping gases by a silicon micro pump with dynamic passive valves
Author :
Gerlach, Torsten
Author_Institution :
Fac. Mech. Eng., Tech. Hochschule Ilmenau, Germany
Abstract :
Pumping gases by a membrane pump requires a strong compression ratio inside the pump chamber. This demand is fulfilled by an optimized micro pump with dynamic passive valves, working at the resonance frequency. The experimental results for the zero-load pump rate and the maximum pump pressure are 7.5 ml/min and 2.8 kPa, respectively. The pump´s behaviour is described by a mathematical model. The calculated values coincide with the experimental data quite well
Keywords :
elemental semiconductors; microactuators; micropumps; silicon; valves; 2.8 kPa; Si; compression ratio; dynamic passive valves; mathematical model; membrane pump; micropump; pump chamber; pump pressure; resonance frequency; zero-load pump rate; Actuators; Biomembranes; Fluid dynamics; Gases; Micropumps; Pumps; Resonance; Silicon; Transducers; Valves;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613658
