DocumentCode
3115773
Title
Molybdenum implantation of stainless steel in the near surface layer: structural and chemical exploration
Author
Mottu, N. ; Vayer, M. ; Andréazza, P. ; Benoit, R. ; Sauvage, Th. ; Erre, R.
Author_Institution
Div. of Mater., Orleans Univ., France
fYear
2000
fDate
2000
Firstpage
761
Lastpage
764
Abstract
Mo+ at 49 keV was implanted on a 316LVM stainless steel in order to modify the first layer within 30 nm. Doses from 1.1015 to 35.1015 ion/cm2 were explored. GIXD showed that implanted Mo first substituted Fe in the austenitic lattice, then formed a new structure and finally amorphised the layer. TRIM calculation and RBS estimation were in good agreement on implanted doses and Mo depth profiles. XPS permitted the identification of the chemical species. The passive layer was modified by Mo implantation. Indeed, about half of Cr oxide was replaced by Mo oxide
Keywords
Monte Carlo methods; Rutherford backscattering; austenitic stainless steel; doping profiles; ion implantation; molybdenum; surface composition; surface structure; 30 nm; 316LVM stainless steel; 49 keV; Mo implantation; RBS estimation; TRIM calculation; XPS; austenitic lattice; depth profiles; implanted doses; near surface layer; stainless steel; Chemical analysis; Chemical elements; Chromium; Corrosion; Immune system; Iron; Lattices; Spectroscopy; Steel; Surface resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Ion Implantation Technology, 2000. Conference on
Conference_Location
Alpbach
Print_ISBN
0-7803-6462-7
Type
conf
DOI
10.1109/.2000.924265
Filename
924265
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