DocumentCode
3116299
Title
FEM based modeling and optimization of a 2D micro mirror
Author
Schock, W. ; Mehner, J. ; Fritz, Jaka ; Muchow, J. ; Friese, C. ; Pinter, S.
Author_Institution
Robert Bosch GmbH, Reutlingen, Germany
fYear
2011
fDate
18-20 April 2011
Firstpage
42375
Lastpage
42527
Abstract
A 2D scanning micro mirror is modelled based on numerical simulations and optimized using the Matlab optimization Toolbox. The simulation model covers structural, fluidic and electrostatic effects. The goals of the optimization are low driving voltages and robustness against process variations. The simulated behaviour of the optimized design is compared to experimental results.
Keywords
finite element analysis; micromirrors; optical design techniques; 2D scanning micromirror; Matlab optimization toolbox; electrostatic effects; finite element method; Computational modeling; Electrostatics; Fingers; Mathematical model; Mirrors; Optimization; Stators;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on
Conference_Location
Linz
Print_ISBN
978-1-4577-0107-8
Type
conf
DOI
10.1109/ESIME.2011.5765782
Filename
5765782
Link To Document