Title :
FEM based modeling and optimization of a 2D micro mirror
Author :
Schock, W. ; Mehner, J. ; Fritz, Jaka ; Muchow, J. ; Friese, C. ; Pinter, S.
Author_Institution :
Robert Bosch GmbH, Reutlingen, Germany
Abstract :
A 2D scanning micro mirror is modelled based on numerical simulations and optimized using the Matlab optimization Toolbox. The simulation model covers structural, fluidic and electrostatic effects. The goals of the optimization are low driving voltages and robustness against process variations. The simulated behaviour of the optimized design is compared to experimental results.
Keywords :
finite element analysis; micromirrors; optical design techniques; 2D scanning micromirror; Matlab optimization toolbox; electrostatic effects; finite element method; Computational modeling; Electrostatics; Fingers; Mathematical model; Mirrors; Optimization; Stators;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on
Conference_Location :
Linz
Print_ISBN :
978-1-4577-0107-8
DOI :
10.1109/ESIME.2011.5765782
