Title :
Modeling, filtering and optimization for AFM arrays
Author :
Hui, H. ; Yakoubi, Y. ; Lenczner, M. ; Cogan, S. ; Meister, A. ; Favre, M. ; Couturier, R. ; Domas, S.
Author_Institution :
Sch. of Mechatron., Northwestern Polytech. Univ., Xi´´an, China
Abstract :
In this paper, we present new tools and results developed for Arrays of Microsystems and especially for Atomic Force Microscope (AFM) array design. For modeling, we developed a two-scale model of cantilever arrays in elastodynamics. A robust optimization toolbox is interfaced to aid for design before the microfabrication process. A model based algorithm of static state estimation using measurement of mechanical displacements by interferometry is stated. Quantization of interferometry data processing is analyzed for FPGA implementation. A robust H∞ filtering problem of the coupled cantilevers is solved for time-invariant system with random noise effects. Our solution allows semi-decentralized computing based on functional calculus that can be implemented by networks of distributed electronic circuits as shown in a previous paper.
Keywords :
atomic force microscopy; cantilevers; elastodynamics; field programmable gate arrays; light interferometry; microfabrication; micromechanical devices; random noise; AFM arrays; FPGA implementation; arrays-of-microsystems; atomic force microscopy; cantilever arrays; data processing; elastodynamics; electronic circuits; functional calculus; interferometry quantization; mechanical displacements; microfabrication process; random noise effects; robust optimization toolbox; semidecentralized computing; static state estimation; Optical wavelength conversion; Optimization; Zinc;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on
Conference_Location :
Linz
Print_ISBN :
978-1-4577-0107-8
DOI :
10.1109/ESIME.2011.5765783
