• DocumentCode
    3116557
  • Title

    Piezoelectric membrane actuator design

  • Author

    Casset, F. ; Cueff, M. ; Defay, E. ; Rhun, G. Le ; Suhm, A. ; Ancey, P. ; Devos, A.

  • Author_Institution
    LETI, CEA, Grenoble, France
  • fYear
    2011
  • fDate
    18-20 April 2011
  • Firstpage
    42374
  • Lastpage
    42495
  • Abstract
    This paper presents the study of piezoelectric actuators. After the description of simulated actuators and simulation conditions, results will be discussed to define the best actuator design in terms of membrane displacement and compactness. The actuator behaviour under temperature variation is also checked.
  • Keywords
    finite element analysis; membranes; piezoelectric actuators; finite element analysis; membrane compactness; membrane displacement; piezoelectric membrane actuator design; Distance measurement; Equations; Mathematical model; Silicon; Stress; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on
  • Conference_Location
    Linz
  • Print_ISBN
    978-1-4577-0107-8
  • Type

    conf

  • DOI
    10.1109/ESIME.2011.5765797
  • Filename
    5765797
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3116557