Novel dual-axis SOI micromachined inertial sensors with optical sensing: design and fabrication

Author

Bochobza-Degani, O. ; Seter, D.J. ; Socher, E. ; Nemirovsky, Y.

Author_Institution

Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel

fYear

2000

fDate

2000

Firstpage

65

Lastpage

68

Abstract

A new design of micromachined inertial sensors, accelerometer and rate-gyroscope, is presented. The design employs the modulated integrative differential optical sensing for the output motion sensing. The former uni-axial design with cantilever suspension is presented. Then the new dual-axis design with “spider” suspensions is discussed. The design and fabrication issues of the new design are discussed, in-light of the results of the uni-axial design. The predicted performance of this device is presented

Keywords

accelerometers; gyroscopes; micromachining; microsensors; optical sensors; silicon-on-insulator; SOI micromachined inertial sensor; accelerometer; cantilever suspension; dual-axis design; fabrication; modulated integrative differential optical sensing; rate gyroscope; spider suspension; uni-axial design; Accelerometers; Circuits; Displacement measurement; Motion measurement; Optical design; Optical device fabrication; Optical modulation; Optical noise; Optical sensors; Photodiodes;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and electronic engineers in israel, 2000. the 21st ieee convention of the

Conference_Location

Tel-Aviv

Print_ISBN

0-7803-5842-2

Type

conf

DOI

10.1109/EEEI.2000.924321

Filename

924321