DocumentCode
3116936
Title
Fabrication of an all-metal atomic force microscope probe
Author
Rasmussen, Jan P. ; Tang, Peter T. ; Sander, Curt ; Hansen, Ole ; Moller, P.
Author_Institution
Microelectron. Centre, Tech. Univ. Denmark, Lyngby, Denmark
Volume
1
fYear
1997
fDate
16-19 Jun 1997
Firstpage
463
Abstract
This paper presents a method for fabrication of an all-metal atomic force microscope probe (tip, cantilever and support) for optical read-out, using a combination of silicon micro-machining and electroforming. The paper describes the entire fabrication process for a nickel AFM-probe. In addition the first measurements with the new probe are presented
Keywords
atomic force microscopy; electroforming; elemental semiconductors; micromachining; microsensors; silicon; AFM; Ni AFM-probe; STM; Si micromachining; atomic force microscope probe; cantilever; electroforming; electroplating; fabrication; optical read-out; thermal expansion; thick resist; tip; Atom optics; Atomic force microscopy; Nickel; Optical device fabrication; Optical films; Optical microscopy; Optical sensors; Probes; Resists; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.613686
Filename
613686
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