Recent developments in reduced order modeling based on mode superposition technique

The paper is focused on advanced reduced order modeling (ROM) methods for MEMS using mode superposition technique and finite element solvers for data extraction for the governing equations. Dynamically accurate behavior representations can be achieved for microstructures with flexible components and their most important interactions with thermal, electrostatic and fluid fields. Results are macromodel based on analytical terms which can be transferred to electronic and system simulators for virtual prototyping and device analyses.