Title :
Rapid investigation of nanocrystalline diamond vibrating membranes with a stroboscopic interferometer
Author :
Francis, L.A. ; Kromka, A. ; Steinmüller-Nethl, D. ; Bertrand, P. ; Van Hoof, C.
Author_Institution :
PCPM, Univ. catholique de Louvain, Louvain-la-Neuve, Belgium
Abstract :
Nanocrystalline diamond is a promising material for the fabrication of highly sensitive flexural plate wave (FPW) sensors. The design of the FPW sensor requires the determination of the mechanical properties of a thin film membrane. In this paper we investigate the mechanical resonance of nanocrystalline diamond membranes with a stroboscopic interferometer optical system. Membranes with lateral dimensions in the range 0.8 to 6 mm and about 1 μm thick were excited in air by a loudspeaker. The resonance frequencies helped to determine the mechanical properties of the diamond membrane and give directly the parameter of interest for the FPW sensor design. Our method allows the rapid investigation of the material without requiring an integrated transduction system and can be used to analyze structures with the actual dimensions of the FPW sensor.
Keywords :
chemical sensors; diamond; elastic waves; elemental semiconductors; light interferometry; membranes; micromechanical resonators; microsensors; nanostructured materials; resonance; stroboscopes; 0.8 to 6 mm; 1 micron; C; FPW sensor design; flexural plate wave sensors; integrated transduction system; loudspeaker excitation; mechanical properties; mechanical resonance; membrane lateral dimensions; nanocrystalline diamond vibrating membranes; rapid investigation; stroboscopic interferometer; thin film membrane; Biomembranes; Mechanical factors; Mechanical sensors; Optical device fabrication; Optical films; Optical interferometry; Optical materials; Optical sensors; Resonance; Thin film sensors;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426121
