• DocumentCode
    311792
  • Title

    Sol-gel derived Pb1-xCaxTiO3 thin films

  • Author

    Teowee, G. ; McCarthy, K.C. ; Alexander, T.P. ; Bukowski, T.J. ; Uhlmann, D.R.

  • Author_Institution
    Donelly Corp., Tucson, AZ, USA
  • Volume
    1
  • fYear
    1996
  • fDate
    18-21 Aug 1996
  • Firstpage
    487
  • Abstract
    A series of sol-gel derived CaTiO3-PbTiO3 thin films were prepared on platinized Si substrates and fired to temperatures ranging from 550 C to 650 C. Multiple spincoating, with an intermediate firing of 400 C between coatings, was performed to obtain films up to 0.5 μm thick. All the films were single phase perovskite after firing to 600 C. The dielectric constant ranged from 100-300 depending on the amount of Ca. Leakage currents as low as 2&10-9 A/cm2 were obtained in these films
  • Keywords
    calcium compounds; ferroelectric thin films; lead compounds; permittivity; sol-gel processing; 400 C; 550 to 650 C; Pb1-xCaxTiO3 thin film; PbCaTiO3; dielectric constant; firing; leakage current; perovskite phase; platinized Si substrate; sol-gel synthesis; spin coating; Ceramics; Crystallization; Dielectrics; Ferroelectric films; Ferroelectric materials; Iron; Piezoelectric films; Polarization; Transistors; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
  • Conference_Location
    East Brunswick, NJ
  • Print_ISBN
    0-7803-3355-1
  • Type

    conf

  • DOI
    10.1109/ISAF.1996.602795
  • Filename
    602795