Title :
Sol-gel derived Pb1-xCaxTiO3 thin films
Author :
Teowee, G. ; McCarthy, K.C. ; Alexander, T.P. ; Bukowski, T.J. ; Uhlmann, D.R.
Author_Institution :
Donelly Corp., Tucson, AZ, USA
Abstract :
A series of sol-gel derived CaTiO3-PbTiO3 thin films were prepared on platinized Si substrates and fired to temperatures ranging from 550 C to 650 C. Multiple spincoating, with an intermediate firing of 400 C between coatings, was performed to obtain films up to 0.5 μm thick. All the films were single phase perovskite after firing to 600 C. The dielectric constant ranged from 100-300 depending on the amount of Ca. Leakage currents as low as 2&10-9 A/cm2 were obtained in these films
Keywords :
calcium compounds; ferroelectric thin films; lead compounds; permittivity; sol-gel processing; 400 C; 550 to 650 C; Pb1-xCaxTiO3 thin film; PbCaTiO3; dielectric constant; firing; leakage current; perovskite phase; platinized Si substrate; sol-gel synthesis; spin coating; Ceramics; Crystallization; Dielectrics; Ferroelectric films; Ferroelectric materials; Iron; Piezoelectric films; Polarization; Transistors; X-ray scattering;
Conference_Titel :
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location :
East Brunswick, NJ
Print_ISBN :
0-7803-3355-1
DOI :
10.1109/ISAF.1996.602795
