Title :
High Frequency Viscosity Sensing with FBARs
Author :
Weber, Jan ; Link, Mathias ; Primig, Robert ; Pitzer, Dana ; Schreiter, Matthias
Author_Institution :
Corporate Technol., Siemens AG, Munchen
Abstract :
Film bulk acoustic resonators operating in thickness shear mode at a frequency of 720 MHz are used to characterize liquids with different viscosities. Their advantage over QCM devices are higher packaging density, CMOS-compatibility as well as lower production costs. Sensor response corresponds with theoretical models in the low viscosity regime but deviates strongly for higher viscosities. This behavior is analyzed as well as an assessment of the FBAR as a viscosity sensor is made
Keywords :
CMOS integrated circuits; acoustic resonators; bulk acoustic wave devices; sensors; viscosity measurement; 720 MHz; CMOS-compatibility; FBAR; QCM devices; bulk acoustic resonators; high frequency viscosity sensing; packaging density; viscosity sensor; Acoustic sensors; Biosensors; Costs; Electrodes; Film bulk acoustic resonators; Frequency; Sensor phenomena and characterization; Sensor systems; Sensor systems and applications; Viscosity;
Conference_Titel :
International Frequency Control Symposium and Exposition, 2006 IEEE
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0074-0
Electronic_ISBN :
1-4244-0074-0
DOI :
10.1109/FREQ.2006.275362
