• DocumentCode
    3118073
  • Title

    Development of an Ultra-Small Angular Rate Sensor Element with a Laminated Quartz Tuning Fork

  • Author

    Ohtsuka, Takahiro ; Inoue, Takahiro ; Yoshimatsu, Masahiro ; Matsudo, Hideryo ; Okazaki, Masanobu

  • Author_Institution
    Nihon Dempa Kogyo Co., Tokyo
  • fYear
    2006
  • fDate
    38869
  • Firstpage
    129
  • Lastpage
    132
  • Abstract
    The authors have developed an ultra-small angular rate sensor element which was manufactured from a laminated quartz wafer. The quartz tuning fork sensor element (1.3 times 2.2 times 0.24 mm3) is so small that it can be applied to the 2.5 times 3.2 times 1.3 mm 3 surface mount type angular rate sensor. This ultra-small angular rate sensor element consisted of weighted longer arms and a winged base part for damper. According to the experimental result, it was confirmed that the scale factor was 0.67 mV/(deg/s), zero point voltage was 1.349 V and the maximum angular rate was plusmn 210 deg/s
  • Keywords
    angular measurement; nonelectric sensing devices; quartz; vibrations; 1.349 V; angular rate sensor element; laminated quartz wafer; quartz tuning fork sensor element; surface mount type; ultra-small sensor element; Arm; Circuits; Consumer products; Digital cameras; Lithography; Manufacturing; Mass production; Vibrations; Voltage; Weight control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    International Frequency Control Symposium and Exposition, 2006 IEEE
  • Conference_Location
    Miami, FL
  • Print_ISBN
    1-4244-0074-0
  • Electronic_ISBN
    1-4244-0074-0
  • Type

    conf

  • DOI
    10.1109/FREQ.2006.275364
  • Filename
    4053742
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3118073