Title :
Bandwidth Improvement Methods In Acoustically-Coupled Thin Film BAW Devices
Author :
Kulkarni, Vinay ; Prasad, Kanti ; Barber, Bradley
Author_Institution :
Dept. of Electr. & Comput. Eng., Massachusetts Univ., Lowell , MA
Abstract :
In this paper, the results of a stacked crystal filter (SCF) are presented. It is shown that the bandwidth of the SCF can be designed by choice of electrode materials, device dimensions and use of external components such as inductors. This paper also discusses the fabrication of SCF along with the device layouts. A single stage and a two-stage SCF are designed and it is shown that the bandwidth of two-stage can only be increased if the inductor is connected between stages
Keywords :
bulk acoustic wave devices; crystal filters; inductors; thin film devices; BAW devices; acoustically coupled devices; bandwidth improvement methods; device dimensions; device layouts; electrode materials; inductor; stacked crystal filter; thin film devices; Acoustic waves; Bandwidth; Bulk acoustic wave devices; Electrodes; Impedance; Microwave filters; Piezoelectric films; Radio frequency; Resonator filters; Thin film devices;
Conference_Titel :
International Frequency Control Symposium and Exposition, 2006 IEEE
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0074-0
Electronic_ISBN :
1-4244-0074-0
DOI :
10.1109/FREQ.2006.275371