Title :
Compound Resonators and Microweighing Sensors
Author_Institution :
US Army Commun.-Electron., RDEC, Fort Monmouth , NJ
Abstract :
Simplified derivations of the Quimby compound resonator (QCR) equations are provided, with their reduction to the quartz crystal microbalance (QCM) forms, for both the originally assumed condition of negligible transducer piezocoupling, as well as for the much more interesting case where both the transducer and unknown possess arbitrary piezoelectric coupling factors. For the QCM configuration, the accuracy of the mass determination depends somewhat upon where the frequency measurements are made on the impedance circle. For the QCR situation where both transducer and measurand are piezoelectric, the piezocoupling may be determined along with the elastic coefficients, by alterations in the electrical boundary conditions
Keywords :
crystal resonators; microbalances; micromechanical resonators; microsensors; transducers; weighing; Quimby compound resonator equations; arbitrary piezoelectric coupling factors; elastic coefficients; electrical boundary conditions; frequency measurements; impedance circle; micro weighing sensors; quartz crystal microbalance; transducer piezocoupling; Acoustic measurements; Crystalline materials; Equations; Length measurement; Piezoelectric transducers; Resonance; Solids; Transmission line measurements; Vibration measurement; Virtual manufacturing;
Conference_Titel :
International Frequency Control Symposium and Exposition, 2006 IEEE
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0074-0
Electronic_ISBN :
1-4244-0074-0
DOI :
10.1109/FREQ.2006.275375