Title :
Predictions and measurement of mass loading effects on quartz bulk acoustic wave resonators
Author :
Mateescu, I. ; Bran, C. ; Ballandras, S. ; Gachon, D.
Author_Institution :
Nat. Inst. of Mater. Phys., Bucharest-Magurele
Abstract :
The use of a variational perturbation method combined with finite element analysis is presented here to simulate the influence of mass-loading effects on the resonance frequency of bulk acoustic wave resonator. Computations are conducted on 2D and 3D and any shape of resonator can be considered. Predictions are compared to experimental data
Keywords :
bulk acoustic wave devices; crystal resonators; finite element analysis; perturbation techniques; 2D resonator; 3D resonator; bulk acoustic wave resonators; finite element analysis; mass loading effects; quartz resonators; resonance frequency; variational perturbation method; Acoustic materials; Acoustic measurements; Acoustic waves; Distributed computing; Electrodes; Finite element methods; Perturbation methods; Resonance; Shape; Stress;
Conference_Titel :
International Frequency Control Symposium and Exposition, 2006 IEEE
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0074-0
Electronic_ISBN :
1-4244-0074-0
DOI :
10.1109/FREQ.2006.275381
