Title :
A nanoparticle-based microsensor for room temperature hydrogen detection
Author :
Rajnikant, Agrawal ; Shukla, Satyajit ; Ludwig, Lawrence ; Anjum, Mehta ; Cho, Hyoung J. ; Seal, Sudipta
Author_Institution :
Dept. of Electr. Eng., Univ. of Central Florida, Orlando, FL, USA
Abstract :
In this work, we report a novel micromachined hydrogen sensor operating at room temperature. The sensor has been successfully designed and fabricated, based on interdigitated conductometric microelectrodes integrating indium oxide (In2O3)-doped tin oxide (SnO2) semiconductor nanocrystalline particles with platinum (Pt) nanoclusters. Very high H2 sensitivity (110×103) with fast response and recovery has been observed for the presented sensor at room temperature and low hydrogen gas concentration. The nanomaterial/microdevice integration for a highly efficient sensor device with unprecedented functions has been explored and investigated systematically.
Keywords :
gas sensors; hydrogen; indium compounds; microelectrodes; microsensors; nanoparticles; platinum; tin compounds; 293 to 298 K; Pt; SnO2:In2O3; interdigitated conductometric microelectrodes; low gas concentration sensitivity; metallic nanoclusters; micromachined sensor; nanomaterial/microdevice integration; nanoparticle-based microsensor; room temperature gas detection; Gas detectors; Hydrogen; Indium; Microelectrodes; Microsensors; Nanoscale devices; Platinum; Sensor systems; Temperature sensors; Tin;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426182
