Large-volume integrated capillary electrophoresis stage fabricated using micromachining of plastics on silicon substrates

A micromachined capillary electrophoresis separation stage has been fabricated on top of a silicon substrate that contains sample reservoirs, platinum electrodes, and a passivated diode designed for the detection of migrating DNA fluorescing fragments. The 20 μm-high separation stage channels were constructed using a low-temperature, three polymer process that produces optically transparent, hermetic fluidic systems over topologically structured, non-flat substrates. Successful separation of DNA fragments was achieved in 0.46 cm with fragment mobilities between 1.2-1.05 μm·cm/V·s using a bias of 12.8 V/cm in approximately 5 minutes