Title :
Statistical process simulation for CAD/CAM
Author :
Mozumder, Purnendu K. ; Strojwas, Andrzej J. ; Bell, David
Author_Institution :
SRC-CMU Center for Computer-Aided Design, Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
The authors formulate necessary conditions for predictive process simulation: physically-based models and tuning to manufacturing data, which are essential for CAM (computer-aided manufacturing) applications. They illustrate these predictive capabilities by applying the statistically based IC fabrication simulator FABRICS to the outcome of an industrial, scaled-down CMOS fabrication process. From the accuracy of the results, it is evident that the process simulation system based on physical models can be tuned to a desired accuracy
Keywords :
CAD/CAM; integrated circuit manufacture; CAM; FABRICS; computer-aided manufacturing; physically-based models; predictive process simulation; process simulation system; scaled-down CMOS fabrication; statistical process simulation; statistically based IC fabrication simulator; tuning to manufacturing data; Application software; CADCAM; Computational modeling; Computer aided manufacturing; Computer simulation; Fabrication; Manufacturing processes; Predictive models; Semiconductor device modeling; Virtual manufacturing;
Conference_Titel :
Custom Integrated Circuits Conference, 1988., Proceedings of the IEEE 1988
Conference_Location :
Rochester, NY
DOI :
10.1109/CICC.1988.20860
