Title :
Magnetic bistable micro-actuator with integrated permanent magnets
Author :
Dieppedale, C. ; Desloges, B. ; Rostaing, H. ; Delamare, J. ; Cugat, O. ; Meunier-Carus, J.
Author_Institution :
CEA/LETI, Grenoble, France
Abstract :
A new magnetic micro-actuator with integrated permanent magnets has been developed. The design of this device, with a levitating mobile magnet, is a real innovation and is patented. The structure was modeled using analytical and numerical calculations. Furthermore, the fabrication feasibility, using collective micro-technology processes, has recently been demonstrated.
Keywords :
electromagnetic actuators; electroplating; magnetic levitation; microactuators; permanent magnets; electroplating; integrated permanent magnets; levitating mobile magnet; magnetic MEMS technology; magnetic actuation; magnetic bistable microactuator; magnetic materials; Actuators; Coils; Magnetic circuits; Magnetic devices; Magnetic levitation; Magnetic materials; Microactuators; Micromechanical devices; Permanent magnets; Potential energy;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426208
