Title :
Implementing laser based failure analysis methodologies using test vehicles
Author :
Lewis, D. ; Pouget, V. ; Beaudoin, F. ; Beauchene, T. ; Haller, G. ; Desplat, R. ; Perdu, P. ; Fouillat, P.
Author_Institution :
IXL Lab., Talence, France
Abstract :
Three test vehicles were designed in order to validate laser based failure analysis and process validation techniques. Two test vehicles in order to validate defect localization technique using a laser beam in integrated circuits, the third one is designed for single event upset sensitivity study in digital integrated circuits.
Keywords :
Seebeck effect; failure analysis; integrated circuit reliability; integrated circuit testing; measurement by laser beam; IC process validation; Seebeck effect; defect localization technique; digital integrated circuits; heavy ion sensitivity evaluation; laser based failure analysis; laser testing methodologies; pulsed laser; reliability evaluation; single event upset sensitivity; test vehicles; thermal laser stimulation; Circuit testing; Failure analysis; Infrared heating; Laboratories; Laser beams; Optical design; Power lasers; Semiconductor lasers; Vehicles; Voltage;
Conference_Titel :
Microelectronic Test Structures, 2004. Proceedings. ICMTS '04. The International Conference on
Print_ISBN :
0-7803-8262-5
DOI :
10.1109/ICMTS.2004.1309482
