Frame Enclosed Resonator for Miniature Oven Controlled Crystal Oscillator (OCXO)

This paper reports progress on a frame enclosed resonator (FER) integrated with a miniature OCXO. This new approach for a quartz crystal resonator with small active area and low stress was fabricated and directly integrated between a CMOS control chip as a sandwich structure. Integrating an FER on a CMOS chip provides a number of advantages including small size, low power, and reduced warm up time due to smaller volume and surface area