Title :
Estimation Of The In-situ Permeabilities In Thin Film Inductors
Author :
Yamaguchi, M. ; Arakawa, S. ; Yabukami, S. ; Arai, K.I.
Author_Institution :
Tohoku University 2-l-1 Katahira, Aoba-Ku, Sendai 980, Japan
Keywords :
Coils; Conductive films; Frequency measurement; Leg; Magnetic analysis; Magnetic field measurement; Magnetic films; Magnetization; Permeability measurement; Thin film inductors;
Conference_Titel :
Magnetics Conference, 1993. INTERMAG '93., Digest of International
Conference_Location :
Stockhom, Sweden
Print_ISBN :
0-7803-1310-0
DOI :
10.1109/INTMAG.1993.642296