Title :
Novel microstructures and technologies applied in chemical analysis techniques
Author :
Spiering, Vincent L. ; Van der Moolen, Johannes N. ; Burger, Gert-Jan ; van den Berg, Albert
Author_Institution :
Twente MicroProducts, Enschede, Netherlands
Abstract :
Novel glass and silicon microstructures and their application in chemical analysis are presented. The micro technologies comprise (deep) dry etching, thin layer growth and anodic bonding. With this combination it is possible to create high resolution electrically isolating silicon dioxide structures with aspect ratio´s similar to those possible in silicon. Main applications are chemical separation methods such as high performance liquid chromatography (HPLC) or electrophoresis (HPCE). Beside these channel structures, a capillary connector with very low dead and mixing volume has been designed and fabricated for use in (correlation) electrophoresis, and tested by means of precision of consecutive single injections
Keywords :
capillarity; chromatography; electrochemical analysis; electrophoresis; etching; glass; isolation technology; micromachining; microsensors; separation; silicon; wafer bonding; Black Silicon Method; Si; Si microstructures; anodic bonding; aspect ratio; capillary connector; channel structures; chemical analysis techniques; chemical separation methods; consecutive single injections; correlation electrophoresis; deep dry etching; glass microstructures; high performance capillary electrophoresis; high performance liquid chromatography; high resolution electrically isolating structures; microchannels; precision; pyrex wafer; thin layer growth; very low dead/mixing volume; Bonding; Chemical analysis; Chemical technology; Connectors; Dry etching; Electrokinetics; Glass; Isolation technology; Microstructure; Silicon compounds;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613699
