5 NRAD high-resolution and multi-functional angle sensor for nanotechnology

In recent years nanotechnology control systems have required a high-resolution and high-precision angle sensor. Technology for the manufacture of a high-precision disk and measurement evaluation technology using an angle calibration system were developed. A high-resolution optical angle sensor with. high precision and a self-accuracy calibrating function was also developed. The resolutions of the measuring instrument and the angle sensor were aimed at 1 ms (0.001 s). The component engineering for realizing 1 ms measurement consisted of eight types of technology: (1) the mechanism section by a disk realization highly precise for 0.3 s; and (2) CAE (computer aided engineering) analysis technology and high-precision coupling technology; (3) the signal dividing technology for an ultra high-resolution signal; (4) the accuracy compensation technology by ROM; (5) the self-accuracy calibrating technology; (6) the angle calibration system technology with 1 ms of resolution; (7) the high-speed serial bi-directional synchronous bus communication technology; and (8) speed signals and an angular-acceleration signal achieved within a sensor. Using these component engineering technologies, a 30-bit resolution high-precision and multi-functional angle sensor was studied. In order to develop an ideal angle sensor, high-precision composition parts were developed. In addition, the development of an evaluation measuring instrument, accuracy compensation technology, signal dividing technology for high-resolution, and wireless high-speed signal communication technology were achieved. Thus, a 30-bit high-resolution and high-precision multi-functional angle sensor was developed.