Fabrication and design of a heat transfer micro channel system at low temperature process by MEMS technique

The paper describes a low temperature fabrication technique for a micro channel system in which a low thermal conductivity material can be used to form the channel wall. This channel can provide a uniform heat flux boundary condition and good insulation on the wall to prevent heat loss from the channel to the outside ambient. Therefore, detailed micro-scale flow and heat transfer process and information along the channel can be studied. Design considerations and fabrication techniques involved in this processes are discussed. A final measurement for the validation of the heaters and the sensors fabricated and a study of the heat transfer coefficient distributions inside the micro channel are presented.