Title :
Real life challenges of enabling automated operations in a technology development environment
Author :
Sheridan, Charles ; Jefferson, Thomas
Abstract :
Paradigm changes in 300 mm semiconductor manufacturing have placed an emphasis on automated operations in both technology development (TD) and high volume manufacturing (HVM) facilities. Intel has addressed the challenges of automated operations through incremental, phase development of capabilities, culminating in Automated Continuous Processing. The automation goal for Intel´s 90 nm process generation is to enable continuous lot processing. This paper will discuss the challenges involved and solutions implemented to remove equipment: user interactions and enable automated processing.
Keywords :
continuous production; electronics industry; industrial control; integrated circuit manufacture; semiconductor technology; 300 mm; 90 nm; automated continuous processing; continuous lot processing; high volume manufacturing; semiconductor manufacturing; technology development; user interactions; Automatic control; Lithography; Manufacturing automation; Manufacturing processes; Materials handling; Metrology; Production facilities; Semiconductor device manufacture; Technology management; Testing;
Conference_Titel :
Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop
Print_ISBN :
0-7803-8312-5
DOI :
10.1109/ASMC.2004.1309530
