Title :
MEMS-based angular rate sensors
Author :
Song, Inseob ; Lee, Byeungleul
Author_Institution :
MEMS Lab., Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
The development of MEMS-based angular rate sensors offers revolutionary improvements in low power, size, and cost. Driven by high-volume commercial market needs, applications continue to grow for modestly performing components at prices below $10/axis. The continued maturation of the technology will enable new applications and markets to be realized. The paper reviews the development of MEMS-based angular rate sensors in Samsung and the applications to consumer electronics.
Keywords :
gyroscopes; micromachining; microsensors; MEMS gyroscope; MEMS sensors; MEMS-based angular rate sensors; Samsung; consumer electronics; inertial sensors; micromachining; modestly performing components; Costs; Electrodes; Fabrication; Glass; Gyroscopes; Mechanical sensors; Micromachining; Micromechanical devices; Silicon; Springs;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426250
