Title :
An inertial-grade laterally-driven MEMS differential resonant accelerometer
Author :
Seok, Seonho ; Kim, Hak ; Chun, Kukjin
Author_Institution :
Seoul Nat. Univ., South Korea
Abstract :
Inertial-grade laterally-driven differential resonant accelerometer (DRXL), using a gap sensitive electrostatic stiffness change effect, is designed, fabricated and tested using a mixed micromachining process based on (111) single crystal silicon. The resonant accelerometer consists of a double ended tuning fork (DETF) and two proof masses in the same plane, so it can detect in-plane acceleration. Each pair, with proof mass and resonator, is completely isolated, so the coupling of mechanical vibration between them is protected. The fabricated accelerometer shows a sensitivity of 64 Hz/g per resonator at nominal frequency of 24,888 Hz, bandwidth of 110 Hz, and a bias stability of 5.2 μg.
Keywords :
accelerometers; micromachining; microsensors; sensitivity; silicon; vibrations; 110 Hz; 24.888 kHz; Si; double ended tuning fork; gap sensitive electrostatic stiffness change effect; in-plane acceleration; inertial-grade laterally-driven MEMS differential resonant accelerometer; mechanical vibration; mixed micromachining process; proof masses; sensitivity; single crystal silicon; Acceleration; Accelerometers; Electrostatics; Micromachining; Micromechanical devices; Protection; Resonance; Silicon; Testing; Vibrations;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426251