Interrupt reduction by triggering of maintenance activities using APC machine alarm analysis

Author

Bruggemann, M.

Author_Institution

Infineon Technol. AG, Munich, Germany

fYear

2004

fDate

4-6 May 2004

Firstpage

57

Lastpage

60

Abstract

As a part of the APC project at Infineon, an automated machine-alarm and -event analysis tool was developed to analyze machine- and process problems. This software is used in the high volume fabs in Munich, Regensburg, Villach, Dresden and Richmond. It is a built-in part in the "APC-Trend" software, which shows trends and systematic deviations of machine and process parameters like temperature, pressure, gas flows and so on. This new tool gives excellent information about machine-problems and the relationship to product logistics, thereby flagging potentially bad lots and wafers for inspection and further analysis.

Keywords

alarm systems; fault diagnosis; maintenance engineering; process control; quality management; advanced process control; automated machine alarm analysis; automated machine event analysis; inspection; interrupt reduction; machine problems; maintenance activities; process parameters; process problems; product logistics; Embedded software; Fault detection; Fluid flow; Information analysis; Inspection; Production; Productivity; Pumps; Temperature; Vents;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop

Print_ISBN

0-7803-8312-5

Type

conf

DOI

10.1109/ASMC.2004.1309535

Filename

1309535