Title :
In situ STM and AFM characterization of Pd nanoparticle activated SnO2 sensor surface
Author :
Mizsei, Janos ; Lantto, Vilho
Author_Institution :
Dept. of Electron Devices, Budapest Univ. of Technol. & Econ., Hungary
Abstract :
In situ atomic force microscopy (AFM) and scanning tunnelling microscopy (STM) studies were made for RF cathode sputtered metal nanolayers on tin-dioxide gas sensor surfaces during the gas sensing process. Our earlier AFM and resistivity measurements revealed the agglomeration of layers during heating. The present in situ AFM and, especially, STM results show a change in the picture quality after hydrogen adsorption, but no changes were found in the grain size during the gas sensing process. As the surface morphology seems to stay unchanged, it may be concluded that the gas response at the exposure is based only on electronic and atomic processes, i.e., changes in work function, surface and interface potential barriers and charge carrier concentration.
Keywords :
adsorption; atomic force microscopy; catalysts; gas sensors; nanoparticles; palladium; scanning tunnelling microscopy; semiconductor thin films; sputtered coatings; surface morphology; tin compounds; work function; Pd; RF cathode sputtered metal nanolayers; SnO2; atomic force microscopy; atomic processes; catalytically active noble metal surfaces; charge carrier concentration; electronic processes; grain size; hydrogen adsorption; in situ AFM; in situ STM; interface potential barriers; palladium nanoparticle activated tin-dioxide gas sensor surface; resistivity measurements; scanning tunnelling microscopy; surface morphology; surface potential barriers; work function; Atomic force microscopy; Atomic layer deposition; Atomic measurements; Cathodes; Conductivity measurement; Force sensors; Gas detectors; Radio frequency; Surface morphology; Tunneling;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426256