Title :
Unobtrusive packaging of optoelectronic devices for optical tactile and shear sensors
Author :
Bosman, Erwin ; Van Hoe, Bram ; Missinne, Jeroen ; Van Steenberge, Geert ; Kalathimekkad, Sandeep ; Van Daele, Peter
Author_Institution :
Center for Microsyst. Technol. (CMST), Ghent Univ., Ghent, Belgium
fDate :
Nov. 28 2011-Dec. 1 2011
Abstract :
This paper presents the development of two new types of optical sensors that can measure both pressure and shear stresses in an unobtrusive way. Standard packaging technologies for optoelectronic components result in very bulky and rigid sensors. We present an optoelectronic package which is flexible, only 40 μm thick and which can be bent down to a bending radius of 2 mm. This advanced packaging technique enables the flexibility and compactness of the sensors, which are needed to be unobtrusive. The resulting pressure and shear sensors are discussed, characterized and demonstrated.
Keywords :
optical sensors; optoelectronic devices; packaging; pressure sensors; tactile sensors; advanced packaging technique; optical shear stress sensor; optical tactile sensor; optoelectronic component; optoelectronic device; optoelectronic package; pressure sensor; standard packaging technology; unobtrusive packaging; Optical sensors; Optical variables measurement; Photodiodes; Sensor phenomena and characterization; Transducers; Vertical cavity surface emitting lasers; VCSEL; flexible; packaging; sensor; shear;
Conference_Titel :
Sensing Technology (ICST), 2011 Fifth International Conference on
Conference_Location :
Palmerston North
Print_ISBN :
978-1-4577-0168-9
DOI :
10.1109/ICSensT.2011.6137031