Title :
Control of resistance to enhance the sensitivity of nanocrystalline tin oxide gas sensitive thick film
Author :
Hong, Sung-Jei ; Moon, Dae-Gyu ; Han, Jeong-In ; Chang, Sang-Gweon ; Huh, Moo-Young
Author_Institution :
Korea Electron. Technol. Inst., South Korea
Abstract :
The sensitivity of a nanocrystalline tin oxide gas sensitive thick film was successfully enhanced by controlling its resistance. For the precise control of the resistance, low temperature catalyst doping (LTCD) method was applied below 300°C to dope a Pt catalyst onto nanocrystalline tin oxide particles. Also, a gas sensitive thick film was fabricated using the nanocrystalline tin oxide particles having a size smaller than 10 nm, and it led to an enhanced sensitivity with respect to methane gas. That is, a good and stable sensitivity (R3500/R1000) of 0.64 was achieved after aging for 5 hours at 400°C by doping with 5wt% of Pt catalyst onto the tin oxide particle.
Keywords :
catalysts; electric resistance; gas sensors; nanoparticles; semiconductor thin films; sensitivity; tin compounds; 406 C; 5 hour; SnO2:Pt; low temperature catalyst doping; methane; nanocrystalline tin oxide gas sensitive thick film; platinum catalyst; resistance; sensitivity; Atmospheric measurements; Crystalline materials; Doping; Electric resistance; Electrical resistance measurement; Surface resistance; Temperature sensors; Thick films; Thickness control; Tin;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426260