Title :
Using embedded objects for yield monitoring
Author :
Bazan, Greg ; Gravel, Francis ; Huisman, Leendert ; Pardee, Anne ; Pastel, Leah ; Rowe, Ken
Author_Institution :
IBM Microelectron., Essex Junction, VT, USA
Abstract :
In this article, we describe the use of embedded objects, such as scan chains and RAMs, for yield learning and as defect monitors. We discuss why these objects are suitable for yield learning, and what needs to be done to use them as such. We close with a number of examples, showing the use of embedded chains to improve yield.
Keywords :
integrated circuit testing; integrated circuit yield; process monitoring; random-access storage; RAM; defect monitoring; embedded objects; integrated circuit testing; integrated circuit yield; scan chains; yield learning; Integrated circuit manufacture; Integrated circuit technology; Integrated circuit yield; Logic; Manufacturing processes; Microelectronics; Monitoring; Process design; Random access memory; Testing;
Conference_Titel :
Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop
Print_ISBN :
0-7803-8312-5
DOI :
10.1109/ASMC.2004.1309549
