DocumentCode
3120558
Title
Using embedded objects for yield monitoring
Author
Bazan, Greg ; Gravel, Francis ; Huisman, Leendert ; Pardee, Anne ; Pastel, Leah ; Rowe, Ken
Author_Institution
IBM Microelectron., Essex Junction, VT, USA
fYear
2004
fDate
4-6 May 2004
Firstpage
124
Lastpage
128
Abstract
In this article, we describe the use of embedded objects, such as scan chains and RAMs, for yield learning and as defect monitors. We discuss why these objects are suitable for yield learning, and what needs to be done to use them as such. We close with a number of examples, showing the use of embedded chains to improve yield.
Keywords
integrated circuit testing; integrated circuit yield; process monitoring; random-access storage; RAM; defect monitoring; embedded objects; integrated circuit testing; integrated circuit yield; scan chains; yield learning; Integrated circuit manufacture; Integrated circuit technology; Integrated circuit yield; Logic; Manufacturing processes; Microelectronics; Monitoring; Process design; Random access memory; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop
Print_ISBN
0-7803-8312-5
Type
conf
DOI
10.1109/ASMC.2004.1309549
Filename
1309549
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