DocumentCode
3120679
Title
Quartz resonator hydrogen sensor using platinum black
Author
Oigawa, Hiroshi ; Kirino, Yu ; Yamazaki, Daisuke ; Ueda, Toshitsugu
Author_Institution
Grad. Sch. of IPS, Waseda Univ., Kitakyushu, Japan
fYear
2011
fDate
Nov. 28 2011-Dec. 1 2011
Firstpage
561
Lastpage
564
Abstract
To achieve accurate detection of hydrogen concentration at the range of under 0.1% to 4% in air, we are developing the quartz resonator hydrogen sensor using platinum catalysts. The platinum electrodes of previous model were fabricated by sputtering. To improve its sensitivity, we focused on the platinum black of which structure has the three-dimensional porous. The electrodes of new model were coated by the platinum black through hydrogen reduction of the hexachloroplatinic acid. From experimental results, it was revealed that the sensitivity of a new model was two times bigger than the previous model.
Keywords
catalysts; crystal resonators; gas sensors; hydrogen; platinum; sputtering; H; hexachloroplatinic acid; hydrogen concentration detection; hydrogen sensor; platinum catalysts; platinum electrodes; quartz resonator; sputtering; Electrodes; Gas detectors; Heating; Platinum; Resonant frequency; Sensitivity; Temperature sensors; Catalyst; Gas sensor; Hydrogen; MEMS; Platinum black; Quartz resonator;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensing Technology (ICST), 2011 Fifth International Conference on
Conference_Location
Palmerston North
ISSN
2156-8065
Print_ISBN
978-1-4577-0168-9
Type
conf
DOI
10.1109/ICSensT.2011.6137042
Filename
6137042
Link To Document