• DocumentCode
    3120679
  • Title

    Quartz resonator hydrogen sensor using platinum black

  • Author

    Oigawa, Hiroshi ; Kirino, Yu ; Yamazaki, Daisuke ; Ueda, Toshitsugu

  • Author_Institution
    Grad. Sch. of IPS, Waseda Univ., Kitakyushu, Japan
  • fYear
    2011
  • fDate
    Nov. 28 2011-Dec. 1 2011
  • Firstpage
    561
  • Lastpage
    564
  • Abstract
    To achieve accurate detection of hydrogen concentration at the range of under 0.1% to 4% in air, we are developing the quartz resonator hydrogen sensor using platinum catalysts. The platinum electrodes of previous model were fabricated by sputtering. To improve its sensitivity, we focused on the platinum black of which structure has the three-dimensional porous. The electrodes of new model were coated by the platinum black through hydrogen reduction of the hexachloroplatinic acid. From experimental results, it was revealed that the sensitivity of a new model was two times bigger than the previous model.
  • Keywords
    catalysts; crystal resonators; gas sensors; hydrogen; platinum; sputtering; H; hexachloroplatinic acid; hydrogen concentration detection; hydrogen sensor; platinum catalysts; platinum electrodes; quartz resonator; sputtering; Electrodes; Gas detectors; Heating; Platinum; Resonant frequency; Sensitivity; Temperature sensors; Catalyst; Gas sensor; Hydrogen; MEMS; Platinum black; Quartz resonator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensing Technology (ICST), 2011 Fifth International Conference on
  • Conference_Location
    Palmerston North
  • ISSN
    2156-8065
  • Print_ISBN
    978-1-4577-0168-9
  • Type

    conf

  • DOI
    10.1109/ICSensT.2011.6137042
  • Filename
    6137042