Title :
Quartz resonator hydrogen sensor using platinum black
Author :
Oigawa, Hiroshi ; Kirino, Yu ; Yamazaki, Daisuke ; Ueda, Toshitsugu
Author_Institution :
Grad. Sch. of IPS, Waseda Univ., Kitakyushu, Japan
fDate :
Nov. 28 2011-Dec. 1 2011
Abstract :
To achieve accurate detection of hydrogen concentration at the range of under 0.1% to 4% in air, we are developing the quartz resonator hydrogen sensor using platinum catalysts. The platinum electrodes of previous model were fabricated by sputtering. To improve its sensitivity, we focused on the platinum black of which structure has the three-dimensional porous. The electrodes of new model were coated by the platinum black through hydrogen reduction of the hexachloroplatinic acid. From experimental results, it was revealed that the sensitivity of a new model was two times bigger than the previous model.
Keywords :
catalysts; crystal resonators; gas sensors; hydrogen; platinum; sputtering; H; hexachloroplatinic acid; hydrogen concentration detection; hydrogen sensor; platinum catalysts; platinum electrodes; quartz resonator; sputtering; Electrodes; Gas detectors; Heating; Platinum; Resonant frequency; Sensitivity; Temperature sensors; Catalyst; Gas sensor; Hydrogen; MEMS; Platinum black; Quartz resonator;
Conference_Titel :
Sensing Technology (ICST), 2011 Fifth International Conference on
Conference_Location :
Palmerston North
Print_ISBN :
978-1-4577-0168-9
DOI :
10.1109/ICSensT.2011.6137042