Title :
Integration of SiGe MEMS resonators with CMOS: Shifting system level paradigms in frequency control
Author :
Quevy, Emmanuel P.
Author_Institution :
Silicon Clocks Inc., Fremont, CA
Abstract :
This invited paper reviews recent progress about Silicon Germanium Technology for the integration of MEMS resonators with CMOS electronics and its application to frequency generation. Topics include process issues, device performances, and system level advantages brought by monolithic integration
Keywords :
CMOS integrated circuits; Ge-Si alloys; frequency control; micromechanical resonators; monolithic integrated circuits; CMOS integration; SiGe MEMS resonators; device performances; frequency control; monolithic integration; silicon germanium technology; system level paradigms; CMOS technology; Frequency control; Germanium silicon alloys; Micromechanical devices; Monolithic integrated circuits; Oscillators; Radio frequency; Resonator filters; Silicon germanium; Stability;
Conference_Titel :
International Frequency Control Symposium and Exposition, 2006 IEEE
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0074-0
Electronic_ISBN :
1-4244-0074-0
DOI :
10.1109/FREQ.2006.275493
