DocumentCode
3120703
Title
Integration of SiGe MEMS resonators with CMOS: Shifting system level paradigms in frequency control
Author
Quevy, Emmanuel P.
Author_Institution
Silicon Clocks Inc., Fremont, CA
fYear
2006
fDate
38869
Firstpage
813
Lastpage
813
Abstract
This invited paper reviews recent progress about Silicon Germanium Technology for the integration of MEMS resonators with CMOS electronics and its application to frequency generation. Topics include process issues, device performances, and system level advantages brought by monolithic integration
Keywords
CMOS integrated circuits; Ge-Si alloys; frequency control; micromechanical resonators; monolithic integrated circuits; CMOS integration; SiGe MEMS resonators; device performances; frequency control; monolithic integration; silicon germanium technology; system level paradigms; CMOS technology; Frequency control; Germanium silicon alloys; Micromechanical devices; Monolithic integrated circuits; Oscillators; Radio frequency; Resonator filters; Silicon germanium; Stability;
fLanguage
English
Publisher
ieee
Conference_Titel
International Frequency Control Symposium and Exposition, 2006 IEEE
Conference_Location
Miami, FL
Print_ISBN
1-4244-0074-0
Electronic_ISBN
1-4244-0074-0
Type
conf
DOI
10.1109/FREQ.2006.275493
Filename
4053871
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