Fabrication of periodically poled domains transducers on LiNbO3

Author

Courjon, E. ; Bodin, N. ; Lengaigne, G. ; Gauthier-Manuel, L. ; Daniau, W. ; Ballandras, S. ; Paruch, P. ; Triscone, J.M. ; Hauden, J.

Author_Institution

UMR CNRS, Besancon

fYear

2006

fDate

38869

Firstpage

831

Lastpage

834

Abstract

The development of piezoelectric transducers based on periodically poled ferroelectrics domains is investigated. Optical quality Z-cut LiNbO₃ wafers have been used for the fabrication of test devices operating in the range 7-70 MHz. The fabrication process is detailed and characterization results are reported. A very good agreement between theoretical predictions achieved by periodic finite element analysis and experiments is observed, allowing for a precise identification of the excited modes

Keywords

VHF devices; ferroelectric devices; ferroelectric thin films; finite element analysis; interdigital transducers; lithium compounds; 7 to 70 MHz; LiNbO₃; optical quality Z-cut wafers; periodic finite element analysis; periodically poled ferroelectrics domains; piezoelectric transducers; test devices fabrication; Admittance; Ferroelectric materials; Finite element methods; Frequency; Optical device fabrication; Optical variables control; Piezoelectric transducers; Signal analysis; Testing; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

International Frequency Control Symposium and Exposition, 2006 IEEE

Conference_Location

Miami, FL

Print_ISBN

1-4244-0074-0

Electronic_ISBN

1-4244-0074-0

Type

conf

DOI

10.1109/FREQ.2006.275497

Filename

4053875