Title :
Synthesis and gas sensing properties of MoO3 thin films by spray pyrolysis
Author :
Ahire, D.V. ; Jain, G.H.
Author_Institution :
Mater. Res. Lab., KTHM Coll., Nashik, India
fDate :
Nov. 28 2011-Dec. 1 2011
Abstract :
MoO3 thin films have been prepared by a simple spray pyrolysis technique at substrate temperature 250°C. The structure and morphology of thin films are characterized by X-ray powder diffraction (XRD), scanning electron microscopy and UV-vis spectroscopy. The gas sensing properties of MoO3 thin film is studied at gas concentration 400 ppm and working temperature of 100-400°C. It was found that the sensitivity depended on the working temperatures and also H2S gas concentration. The results show that the MoO3 thin film can be used to fabricate high performance H2S gas sensors.
Keywords :
gas sensors; molybdenum compounds; pyrolysis; scanning electron microscopy; semiconductor thin films; spray coating techniques; ultraviolet spectra; visible spectra; H2S; H2S gas concentration; MoO3; MoO3 thin film synthesis; UV-vis spectroscopy; X-ray powder diffraction; gas sensing properties; high performance H2S gas sensors; scanning electron microscopy; sensitivity; spray pyrolysis; temperature 100 degC to 400 degC; temperature 250 degC; thin film morphology; thin film structure; working temperatures; Distance measurement; MoO3 thin film; sensor; spray pyrolysis;
Conference_Titel :
Sensing Technology (ICST), 2011 Fifth International Conference on
Conference_Location :
Palmerston North
Print_ISBN :
978-1-4577-0168-9
DOI :
10.1109/ICSensT.2011.6137048
