Synthesis and gas sensing properties of MoO3 thin films by spray pyrolysis

Author

Ahire, D.V. ; Jain, G.H.

Author_Institution

Mater. Res. Lab., KTHM Coll., Nashik, India

fYear

2011

fDate

Nov. 28 2011-Dec. 1 2011

Firstpage

589

Lastpage

593

Abstract

MoO₃ thin films have been prepared by a simple spray pyrolysis technique at substrate temperature 250°C. The structure and morphology of thin films are characterized by X-ray powder diffraction (XRD), scanning electron microscopy and UV-vis spectroscopy. The gas sensing properties of MoO₃ thin film is studied at gas concentration 400 ppm and working temperature of 100-400°C. It was found that the sensitivity depended on the working temperatures and also H₂S gas concentration. The results show that the MoO₃ thin film can be used to fabricate high performance H₂S gas sensors.

Keywords

gas sensors; molybdenum compounds; pyrolysis; scanning electron microscopy; semiconductor thin films; spray coating techniques; ultraviolet spectra; visible spectra; H₂S; H₂S gas concentration; MoO₃; MoO₃ thin film synthesis; UV-vis spectroscopy; X-ray powder diffraction; gas sensing properties; high performance H₂S gas sensors; scanning electron microscopy; sensitivity; spray pyrolysis; temperature 100 degC to 400 degC; temperature 250 degC; thin film morphology; thin film structure; working temperatures; Distance measurement; MoO3 thin film; sensor; spray pyrolysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensing Technology (ICST), 2011 Fifth International Conference on

Conference_Location

Palmerston North

ISSN

2156-8065

Print_ISBN

978-1-4577-0168-9

Type

conf

DOI

10.1109/ICSensT.2011.6137048

Filename

6137048