Title :
Leveraging mainstream design and analysis tools for MEMS
Author :
Mirman, Llya ; Flanders, Dale
Author_Institution :
SolidWorks Corp., Massachusetts, MA, USA
Abstract :
Mainstream CAD/CAE tools are used to rapidly design and commercialize a broad product line of rugged MEMS-based optoelectronic devices for applications including telecom, oil and gas production, process monitoring, medical diagnostics, and scientific discovery. These tools deliver the robust capabilities previously available only with specialized, often expensive, MEMS-focused options. This paper illustrates some of the considerations in choosing a MEMS CAD/CAE tool, and provides examples of mainstream tools successfully used in MEMS design and analysis.
Keywords :
CAD; computer aided engineering; micromechanical devices; optoelectronic devices; product design; CAD; CAE; MEMS; gas production; leveraging mainstream design; medical diagnostics; microelectro mechanical devices; optoelectronic device; process monitoring; robust capability; scientific discovery; Biomedical monitoring; Commercialization; Computer aided engineering; Design automation; Medical diagnosis; Micromechanical devices; Optoelectronic devices; Petroleum; Production; Telecommunications;
Conference_Titel :
Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop
Print_ISBN :
0-7803-8312-5
DOI :
10.1109/ASMC.2004.1309563
