Title :
A novel system for fully automated creation of layout, documentation and test programs for electrical test structures
Author :
Leonardelli, Georg ; Roehrer, Georg ; Minixhofer, Rainer ; Knaipp, Martin
Author_Institution :
Yield Enhancement, Austriamicrosyst. AG, Vienna, Austria
Abstract :
Modern semiconductor processes have increasing complexity and thus an extremely high number of degrees of freedom. During the development of such a process a large number of test structures are necessary to understand the interaction of process parameters. In this paper we present a new method to streamline the information flow from development to layout and test.
Keywords :
automatic programming; automatic testing; integrated circuit layout; integrated circuit testing; semiconductor technology; system documentation; automated test program generation; degrees of freedom; documentation; electrical test structures; process development; process parameters; semiconductor processes; Automatic testing; Documentation; Parameter extraction; Pins; Research and development; Semiconductor device measurement; Semiconductor device testing; Substrates; System testing; Voltage;
Conference_Titel :
Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop
Print_ISBN :
0-7803-8312-5
DOI :
10.1109/ASMC.2004.1309566
