DocumentCode :
3121111
Title :
Intel 300 mm fab layout and material handling automation integration learning
Author :
Carriker, Wayne
Author_Institution :
LTD Autom., Intel Corp., Hillsboro, OR, USA
fYear :
2004
fDate :
4-6 May 2004
Firstpage :
257
Lastpage :
261
Abstract :
As Intel has moved into 300 mm manufacturing, we have identified key fab layout and material handling integration lessons. By incorporating learnings from our first generation facilities, we believe our new fabs are well positioned to provide efficient operations and the cost benefits expected from 300 mm. Now we are exploring the issues faced in enhancing our initial 300 mm factories as well as converting our 200 mm facilities in a cost effective manner. In addition, we have also started to look at a couple of key issues facing process development in the highly automated 300 mm environment: split/merge operations, and ad-hoc processing. Identifying solutions in these areas is important to allow technology to continue at the demanding pace of Moore´s law.
Keywords :
facilities layout; integrated circuit manufacture; intelligent manufacturing systems; materials handling; 200 mm; 300 mm; Intel fab layout; Moores law; ad hoc processing; cost effective analysis; material handling automation; material handling integration learning; material handling integration lessons; process development; split-merge operations; Costs; Design automation; Manuals; Manufacturing automation; Manufacturing processes; Materials handling; Production facilities; Semiconductor device manufacture; Uninterruptible power systems; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop
Print_ISBN :
0-7803-8312-5
Type :
conf
DOI :
10.1109/ASMC.2004.1309578
Filename :
1309578
Link To Document :
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