Title :
Novel cantilever for biosensing applications
Author :
Karhade, Ornkar G. ; Chiluveru, Sudhir S. ; Apte, Prakash R.
Author_Institution :
Dept. of Mech. Eng., Indian Inst. of Technol., Mumbai, India
Abstract :
In this paper, we propose a novel microcantilever for biosensing applications, which we call a segmented cantilever. The aim of this paper is to show that the proposed design minimizes the disadvantages of the currently used micro-cantilevers.
Keywords :
biosensors; microsensors; molecular biophysics; biosensing applications; microcantilever; microsensors; molecular biophysics; segmented cantilever; Biosensors; Electric resistance; Laser beams; Micromechanical devices; Molecular biophysics; Optical sensors; Piezoresistance; Stress; Surface resistance; Surface tension;
Conference_Titel :
Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop
Print_ISBN :
0-7803-8312-5
DOI :
10.1109/ASMC.2004.1309606
