BAW microwave temperature sensor

Author

Mansfeld, G.D. ; Alekseev, S.G. ; Kotelyansky, I.M. ; Kirillov, A.G. ; Veretin, V.S.

Author_Institution

1st-3rd Inst. of Radioengineering & Electron., RAS, Russia

fYear

2004

fDate

24-27 Oct. 2004

Firstpage

876

Abstract

The paper studies the possibility of using microwave high overtone bulk acoustic wave resonators (HBAR) in temperature sensors in liquids. The shear 430 MHz BAW are excited in the resonator structure providing high temperature sensitivity and relatively low harmful mechanical sensitivity of sensor on ambient liquid media. The new technical suggestion is that the resonator is acoustically isolated and protected from the mechanical influence of ambient media by multilayer Bragg quarter-wavelength thin film reflectors.

Keywords

acoustic resonators; bulk acoustic wave devices; liquids; microwave devices; sensitivity; temperature sensors; thin films; 430 MHz; BAW microwave temperature sensor; Bragg quarter-wavelength reflectors; acoustic isolation; liquids; mechanical sensitivity; microwave high overtone bulk acoustic wave resonators; multilayer thin film reflectors; shear BAW; temperature sensitivity; temperature sensors; Acoustic sensors; Electrodes; Electromagnetic measurements; Mechanical sensors; Nonhomogeneous media; Protection; Resonant frequency; Substrates; Temperature sensors; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2004. Proceedings of IEEE

Print_ISBN

0-7803-8692-2

Type

conf

DOI

10.1109/ICSENS.2004.1426310

Filename

1426310