Title :
A measuring circuit for MEMS resonant accelerometer
Author :
Xu, Pei ; Liu, Jun ; Zhang, Wendong
Author_Institution :
Minist. Educ. Key Lab on Instrum. Sci. & Dynamic Meas., North China Inst. of Technol., Taiyuan, China
Abstract :
The MEMS accelerometer has characteristics of high precision, small volume, low cost and is easy to be integrated. It has received attention from many people. Focused on the measurement of MEMS resonant accelerometer signals, the article introduces a new method of measuring weak signals, and designs a relative difference frequency measurement circuit. The circuit is simple in design, and proved to be easily integrated and has a good precision and anti-disturbance capability.
Keywords :
accelerometers; integrated circuit design; microsensors; signal processing; MEMS accelerometer; MEMS resonant accelerometer; anti-disturbance capability; cost; measuring circuit; precision; relative difference frequency measurement circuit; volume; weak signals; Acceleration; Accelerometers; Capacitance; Costs; Electromagnetic measurements; Frequency measurement; Integrated circuit measurements; Micromechanical devices; RLC circuits; Resonance;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426315
